Influence of Plasma-Enhanced Chemical Vapor Deposition Parameters on Characteristics of As–Te Chalcogenide Films
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G. Chidichimo | L. Mochalov | A. Logunov | A. Nezhdanov | G. Filpo | A. Mashin | M. Kudryashov | A. Strikovskiy | M. Gushchin | Mikhail Gushchin