论文信息 - A multi-project MEMS lecture and laboratory course

A multi-project MEMS lecture and laboratory course

This paper will describe a senior/graduate level, elective, lecture and laboratory course Microelectromechanical Systems (MEMs). The course was designed for students in RIT's microelectronic engineering program. Therefore, the students had a basic understanding of most processing technologies. The lecture focused on physical fundamentals of mechanical structures and MEMs specific process technology. The laboratory part of the program included device design, process design, maskmaking, processing and testing of a multi-project chip.

Lynn Fuller

[1] Lynn Fuller,et al. Microelectronic engineering at RIT-10 years of industry partnership , 1993, [1993] Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium.

[2] Lynn Fuller,et al. A new program at RIT: master of engineering in microelectronics manufacturing engineering , 1989, Proceedings., Eighth University/Government/Industry Microelectronics Symposium.

[3] Alexander D. Khazan. Transducers and Their Elements: Design and Application , 1993 .

[4] K. J. Gabriel,et al. Design, fabrication, and operation of submicron gap comb-drive microactuators , 1992 .

[5] R. Feynman. There's plenty of room at the bottom , 1999 .

[6] K. R. Williams,et al. Etch rates for micromachining processing , 1996 .

[7] Richard P. Feynman. There's plenty of room at the bottom [data storage] , 1992, Journal of Microelectromechanical Systems.

[8] Richard M. White,et al. Piezoelectric cantilever microphone and microspeaker , 1996 .

[9] I. J. Sorkin,et al. A Method of Using Audio Signal-to-Noise Measurements to Obtain Criterion Contours for the Probability Scoring Model for Scoring Voice Communications Reception , 1968 .