论文信息 - Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

In this work, we present a non-linear electromechanical model of an electrostatically excited cantilever that can be used to perform system level electrical simulations. This model is implemented by using an analog hardware description language (VHDL-AMS) that allows its use in a common IC CAD environment like CADENCE. Small-signal and large-signal simulations are performed and the results are compared with a simple linear model (RLC//C) showing the benefits of this model. This model is validated by its fit with the experimental results obtained from a monolithic sub-micrometer cantilever based sensor

[1] Xavier Borrisé,et al. Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection , 2001 .

[2] Núria Barniol,et al. High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors , 2005, 2005 IEEE International Symposium on Circuits and Systems.