Design and singular perturbation control of a piezotube-based nanomanipulator

The need for more sophisticated fabrication techniques and better performing materials is relevant to several fields. Tackling this problem from a bottom-up perspective is currently an active field of research. At this time, the best candidate to achieve smart nanomanipulation is through probe-based nanofabrication. However, a major limitation of existing nanomanipulation systems is the constrained motion and maneuver of the probe. In this paper, we propose a new design of an AFM probe suitable for nanomanipulation. The design relies on active elements that improve the sensing and actuation capabilities of the AFM as a nanomanipulator. In addition, a piezopatch is attached to the cantilever to be able to tune its stiffness in situ. Design considerations and path tracking performance of the proposed probe are analyzed.

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