论文信息 - Thermal and mechanical analysis of photoresist and silylated photoresist films : application to AZ 5214 TM - 字舞流文

Thermal and mechanical analysis of photoresist and silylated photoresist films : application to AZ 5214 TM

Evangelos Gogolides | Michael Hatzakis | E. Tegou | M. Hatzakis | E. Gogolides | E. Tegou | K. Papadokostaki | Konstantinos Beltsios | K. G. Papadokostaki | K. Beltsios

[1] P. Paniez,et al. Plasma etching of polymers: A reinvestigation of temperature effects , 1991 .