The impact of annealing temperature and time on the electrical performance of Ti/Pt thin films
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[1] Pascal Mailley,et al. Thin film platinum cuff electrodes for neurostimulation: in vitro approach of safe neurostimulation parameters. , 2004, Bioelectrochemistry.
[2] Sung Tae Kim,et al. Study on Microstructures and Interdiffusion Behavior in Pt/Ti/SiO2/Si and Pb(Zr, Ti)O3/Pt/Ti/SiO2/Si Multilayer Systems , 1995 .
[3] Cr Tellier,et al. Size Effects in Thin Films , 1982 .
[4] V. P. Makarov,et al. Grain size and recrystallization of TiN, ZrN, NbN, and CrN alloyed and multilayer films , 1995 .
[5] Frédérick Mailly,et al. Anemometer with hot platinum thin film , 2001 .
[6] I. Brown,et al. Electrical resistivity of vacuum-arc-deposited platinum thin films , 2000 .
[7] Doris Schmitt-Landsiedel,et al. Scaling properties and electromigration resistance of sputtered Ag metallization lines , 2001 .
[8] C. Hwang,et al. An analysis of imprinted hysteresis loops for a ferroelectric Pb(Zr,Ti)O3 thin film capacitor using the switching transient current measurements , 2009 .
[9] Zhang Duan-ming,et al. Effect of Bi2O3 seed layer on crystalline orientation and ferroelectric properties of Bi3.25La0.75Ti3O12 thin films prepared by rf-magnetron sputtering method , 2009 .
[10] K. Jensen,et al. Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatus , 1998 .
[11] Jérôme Courbat,et al. Reliability improvement of suspended platinum-based micro-heating elements , 2008 .
[12] Lilin Li,et al. Platinum resistive film CO sensor without selective layer , 2005 .
[13] Thomas Geßner,et al. Microstructural changes of Pt/Ti bilayer during annealing in different atmospheres — an XRD study , 1997 .
[14] Robert E. Jones,et al. Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions , 1993 .
[15] V. Urban,et al. Microstructure Evolution and Grain Growth Kinetics in Annealed Nanocrystalline Chromium , 2007 .
[16] M. DiBattista,et al. Determination of diffusion in polycrystalline platinum thin films , 1999 .
[17] Yunzhi Wang,et al. Grain growth in sputtered nanoscale PdIn thin films , 2004 .
[18] Ulrich Schmid,et al. Effect of high temperature annealing on the electrical performance of titanium/platinum thin films , 2008 .
[19] F. Génin,et al. The effect of stress on grain boundary grooving , 1993 .
[20] U. Schmid,et al. Influence of thermal annealing on the resistivity of titanium/platinum thin films , 2006 .
[21] A. W. Groenland,et al. Stability of thin platinum films implemented in high-temperature microdevices , 2009 .
[22] Y. Li,et al. Analysis of mean square penetration depth in grain boundary diffusion , 1996 .
[23] Ulrich Schmid,et al. A volumetric flow sensor for automotive injection systems , 2008 .
[24] W. C. Dautremont-Smith,et al. Stress measurements of Pt/Ti/InP and Pt/Ti/SiO2/InP systems: In situ measurements through sintering and after rapid thermal processing , 1990 .
[25] M. Shatzkes,et al. Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces , 1970 .
[26] Sylvain Petitgrand,et al. Characterization of static and dynamic optical actuation of Al microbeams by microscopic interferometry techniques , 2003 .
[27] H. Hoffmann,et al. Mean free path and density of conductance electrons in platinum determined by the size effect in extremely thin films , 1980 .
[28] Wojtek Wlodarski,et al. A thin-film sensing element for ozone, humidity and temperature , 2000 .
[29] T. Tisone,et al. Diffusion in Thin Film Ti–Au, Ti–Pd, and Ti–Pt Couples , 1972 .
[30] B. Koel,et al. Thermal stability of ultrathin titanium films on a Pt(111) substrate , 2004 .
[31] W. De Ceuninck,et al. The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors , 2000 .