Resistive Switching Characteristics of Sol–Gel Zinc Oxide Films for Flexible Memory Applications

Unipolar resistive switching devices are investigated for nonvolatile memory applications in a metal-insulator-metal structure in which the insulator layer is based on sol-gel-derived zinc oxide (ZnO) films prepared by a simple spin-coating process followed by thermal annealing. Fast programming ( les 50 ns) and a high off-to-on resistance ratio ( ges 104) is demonstrated. The influences on the switching behaviors according to the crystallinity of the ZnO films are studied as a function of the annealing temperature. In addition, the devices are fabricated on a flexible plastic substrate and exhibit excellent durability upon repeated bending tests, demonstrating their potential for flexible low-cost memory devices.

[1]  D. Gregory,et al.  Sol-gel formation of ordered nanostructured doped ZnO films , 2004 .

[2]  W. E. Beadle,et al.  Switching properties of thin Nio films , 1964 .

[3]  M. A. El Khakani,et al.  Electrical switching in sol–gel derived Ag–SiO2 nanocomposite thin films , 2005 .

[4]  N. Xu,et al.  Characteristics and mechanism of conduction/set process in TiN∕ZnO∕Pt resistance switching random-access memories , 2008 .

[5]  Chen-Hsi Lin,et al.  Resistive switching properties of sol–gel derived Mo-doped SrZrO3 thin films , 2007 .

[6]  K. Tadanaga,et al.  Coating and water permeation properties of SiO2 thin films prepared by the sol-gel method on nylon-6 substrates , 1996 .

[7]  Frederick T. Chen,et al.  Unipolar resistive switching characteristics of ZnO thin films for nonvolatile memory applications , 2008 .

[8]  G. Braunstein,et al.  Electric-pulse-induced reversible resistance in doped zinc oxide thin films , 2007 .

[9]  Byung Joon Choi,et al.  Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition , 2005 .

[10]  Yuning Li,et al.  Stable, solution-processed, high-mobility ZnO thin-film transistors. , 2007, Journal of the American Chemical Society.

[11]  M. Mulato,et al.  ZnO extended-gate field-effect transistors as pH sensors , 2005 .

[12]  S. Ray Chaudhuri,et al.  Development of Anti-Reflection (AR) Coating on Plastic Panels for Display Applications , 2000 .

[13]  Hua-Chi Cheng,et al.  Transparent ZnO thin film transistor fabricated by sol-gel and chemical bath deposition combination method , 2007 .

[14]  D. G. Baik,et al.  Application of sol-gel derived films for ZnO/n-Si junction solar cells , 1999 .

[15]  Y. Hayashi,et al.  Low resistivity p-ZnO films fabricated by sol-gel spin coating , 2006 .