Atomic Force Microscopy Studies of Barium Titanate Thin Films Prepared by Laser Molecular Beam Epitaxy

Laser molecular beam epitaxy (laser MBE) technique was utilized to grow the barium titanate (BaTiO3, BTO) thin films on SrTiO3(100) substrates. The surface morphology of the BaTiO3 thin films was studied by atomic force microscopy (AFM). Two- and three-dimensional AFM images were obtained. The root mean square surface roughness, the height profile, the histogram and the bearing ratio of the height distributions for the BaTiO3 thin films were analyzed in detail. The results indicate that the laser MBE thin films exhibit an atomically smooth surface.

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