A dual quantization electromechanical sigma-delta modulator vibratory wheel gyroscope

This paper presents a high performance lateral-axis capacitive electromechanical sigma-delta modulator vibratory wheel gyroscope based on a dual quantization technique. The symmetric wheel gyroscope structure was fabricated and wafer-level packaged (WLP) under vacuum. The electromechanical sigma-delta modulator loop adopts a 4th-order multi-feedback and local resonator sigma-delta modulator noise shaping structure, taking advantage of reduced quantization error of multi-quantization in a single modulator. The circuit system is implemented in hardware based on the field-programmable gate array (FPGA) technology. The measured results show that the scale factor and nonlinearity are 2073LSB/°/s and 0.09%, respectively. The noise floor is 3.8m°/s/ V Hz within a 100Hz bandwidth, and the bias instability is 1.259°/hr.