Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping

The deterministic transfer of two-dimensional crystals constitutes a crucial step towards the fabrication of heterostructures based on the artificial stacking of two-dimensional materials. Moreover, controlling the positioning of two-dimensional crystals facilitates their integration in complex devices, which enables the exploration of novel applications and the discovery of new phenomena in these materials. To date, deterministic transfer methods rely on the use of sacrificial polymer layers and wet chemistry to some extent. Here, we develop an all-dry transfer method that relies on viscoelastic stamps and does not employ any wet chemistry step. This is found to be very advantageous to freely suspend these materials as there are no capillary forces involved in the process. Moreover, the whole fabrication process is quick, efficient, clean and it can be performed with high yield.

[1]  B. Wees,et al.  A transfer technique for high mobility graphene devices on commercially available hexagonal boron nitride , 2011, 1110.1045.

[2]  SUPARNA DUTTASINHA,et al.  Van der Waals heterostructures , 2013, Nature.

[3]  K. Novoselov,et al.  Strong Light-Matter Interactions in Heterostructures of Atomically Thin Films , 2013, Science.

[4]  N. Peres,et al.  Field-Effect Tunneling Transistor Based on Vertical Graphene Heterostructures , 2011, Science.

[5]  U Zeitler,et al.  Room-Temperature Quantum Hall Effect in Graphene , 2007, Science.

[6]  Andre K. Geim,et al.  The rise of graphene. , 2007, Nature materials.

[7]  A. Ferrari,et al.  Production and processing of graphene and 2d crystals , 2012 .

[8]  Single‐Layer MoS2 Mechanical Resonators , 2013, Advanced materials.

[9]  Andre K. Geim,et al.  Two-dimensional atomic crystals. , 2005, Proceedings of the National Academy of Sciences of the United States of America.

[10]  D. Basko,et al.  Raman spectroscopy as a versatile tool for studying the properties of graphene. , 2013, Nature nanotechnology.

[11]  Andre K. Geim,et al.  Electric Field Effect in Atomically Thin Carbon Films , 2004, Science.

[12]  A. Neto,et al.  Making graphene visible , 2007, Applied Physics Letters.

[13]  Mika Oksanen,et al.  Stamp transferred suspended graphene mechanical resonators for radio frequency electrical readout. , 2012, Nano letters.

[14]  G. Rubio‐Bollinger,et al.  Optical identification of atomically thin dichalcogenide crystals , 2010, 1003.2602.

[15]  Hugen Yan,et al.  Anomalous lattice vibrations of single- and few-layer MoS2. , 2010, ACS nano.

[16]  F. Beltram,et al.  Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures , 2011, 1105.5710.

[17]  A. Neto,et al.  Two-dimensional crystals-based heterostructures: materials with tailored properties , 2012 .

[18]  L. Vandersypen,et al.  Wedging transfer of nanostructures. , 2010, Nano letters.

[19]  F. Beltram,et al.  The optical visibility of graphene: interference colors of ultrathin graphite on SiO(2). , 2007, Nano letters.

[20]  K. Shepard,et al.  Graphene based heterostructures , 2012 .

[21]  Andres Castellanos-Gomez,et al.  The effect of the substrate on the Raman and photoluminescence emission of single-layer MoS2 , 2013, Nano Research.

[22]  K. Shepard,et al.  Boron nitride substrates for high-quality graphene electronics. , 2010, Nature nanotechnology.

[23]  S. Haigh,et al.  Vertical field-effect transistor based on graphene-WS2 heterostructures for flexible and transparent electronics. , 2012, Nature nanotechnology.

[24]  Yu Huang,et al.  Vertically stacked multi-heterostructures of layered materials for logic transistors and complementary inverters , 2012, Nature materials.