Fabrication of Humidity Measurement Instrument Based on MEMS

A kind of Weather Measurement Instrument based on MEMS is presented. In the instrument, an integrated circuit, which merging the multi-sensors and transducer electronics on a single chip, can be used to measure temperature、humidity、the speed and direction of wind and pressure. The circuit on the PCB in this instrument is more simple and reliable because the technology of MEMS is used. The instrument can be made small and portable. The part of detecting humidity is only introduced.