论文信息 - Langmuir probe diagnostics of plasma generated by means of pulsed Nd:YAG laser interaction with Si-based targets

Langmuir probe diagnostics of plasma generated by means of pulsed Nd:YAG laser interaction with Si-based targets

Investigations of laser ablation plume aimed at applications for the SiO nano-film deposition are reported. The plasma formation and propagation through experimental chamber was investigated by means of Langmuir probe. The effects related to plume splitting and acceleration are discussed.

[1] B. Luk’yanchuk,et al. An analytical model for three-dimensional laser plume expansion into vacuum in hydrodynamic regime , 1996 .

[2] D. Bäuerle,et al. Gas dynamics and film profiles in pulsed-laser deposition of materials. , 1993, Physical review. B, Condensed matter.