Surface characterization study of InP(100) substrates using ISS, AES and ESCA: comparison of substrates from two different commercial sources

Abstract A surface characterization study using electron spectroscopy for chemical analysis (ESCA or XPS), Auger electron spectroscopy (AES) and ion scattering spectroscopy (ISS) has been performed on solvent-cleaned In(100) substrates supplied from two different commercial sources. The data show that the composition and chemical states present at the two surfaces vary considerably which explains why substrates obtained from different sources must be treated differently to optimize the properties of films grown on these substrates. Furthermore, the utilization of multiple surface analytical techniques with varying depth sensitivities indicate that both native oxides are quite complex with a layered nature.