Non-paraxial diffractive optical elements for beam-splitting with ultra-high uniformity

Laser applications like 3D sensing, multifocal microscopy and material processing require high uniformity of the dot patterns created by diffractive optical elements (DOEs). Using an inverse design method for such DOEs, based on gradient-optimization and rigorous coupled-wave analysis, we have investigated a few case studies. We will discuss beam splitters generating a 1D 1×15 fan-out for 1550 nm wavelength, a 1D 1×16 fan-out for 532 nm wavelength and a 2D 3×5 fan-out for 405 nm wavelength with full-pattern angles up to 54°. We obtained uniformity errors as low as 3% for the elements fabricated in fused silica.

[1]  O. SIAMJ.,et al.  A CLASS OF GLOBALLY CONVERGENT OPTIMIZATION METHODS BASED ON CONSERVATIVE CONVEX SEPARABLE APPROXIMATIONS∗ , 2002 .

[2]  Alexander Y. Piggott,et al.  Inverse design and demonstration of a compact and broadband on-chip wavelength demultiplexer , 2015, Nature Photonics.

[3]  Dong Cheon Kim,et al.  Inverse design and demonstration of high-performance wide-angle diffractive optical elements. , 2020, Optics express.

[4]  M A Fiddy,et al.  Efficient optimization of diffractive optical elements based on rigorous diffraction models. , 2001, Journal of the Optical Society of America. A, Optics, image science, and vision.

[5]  Qiang Song,et al.  Inverse optimization for designing wide angle diffractive optical element , 2019, Other Conferences.

[6]  Jelena Vucković,et al.  Inverse design in nanophotonics , 2018, Nature Photonics.

[7]  Daniel Razansky,et al.  High‐Speed Large‐Field Multifocal Illumination Fluorescence Microscopy , 2019, Laser & Photonics Reviews.

[8]  M. [Sbreve]KEREN,et al.  Iterative Fourier transform algorithm: comparison of various approaches , 2002 .

[9]  Shanhui Fan,et al.  Adjoint-Based Optimization of Active Nanophotonic Devices , 2018, 2019 Conference on Lasers and Electro-Optics (CLEO).

[10]  Simon Thibault,et al.  Cross-diffractive optical elements for wide angle geometric camera calibration. , 2011, Optics letters.

[11]  Zhaoming Zhu,et al.  Topological encoding method for data-driven photonics inverse design. , 2020, Optics express.

[12]  Eli Yablonovitch,et al.  Adjoint shape optimization applied to electromagnetic design. , 2013, Optics express.

[13]  Federico Capasso,et al.  Topology-Optimized Multilayered Metaoptics , 2017, 1706.06715.

[14]  P. Lalanne,et al.  Highly improved convergence of the coupled-wave method for TM polarization and conical mountings , 1996, Diffractive Optics and Micro-Optics.

[15]  Shanhui Fan,et al.  Method for computationally efficient design of dielectric laser accelerator structures. , 2017, Optics express.

[16]  H. Hao,et al.  Wide angle 2D beam splitter design based on vector diffraction theory , 2019, Optics Communications.

[17]  Andrei Faraon,et al.  Multifunctional 25D metastructures enabled by adjoint optimization , 2020, Optica.

[18]  J. Goodman.  Introduction to Fourier optics , 1969 .

[19]  T. Gaylord,et al.  Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings , 1995 .

[20]  Eli Yablonovitch,et al.  Leveraging continuous material averaging for inverse electromagnetic design. , 2017, Optics express.

[21]  Shanhui Fan,et al.  S4 : A free electromagnetic solver for layered periodic structures , 2012, Comput. Phys. Commun..

[22]  Jiwang Yan,et al.  Distortion measurement of optical system using phase diffractive beam splitter. , 2019, Optics express.

[23]  Thomas Kämpfe,et al.  Memory sparing, fast scattering formalism for rigorous diffraction modeling , 2017 .

[24]  Norbert F Scherer,et al.  Stochastic scanning multiphoton multifocal microscopy. , 2006, Optics express.

[25]  Ralf Vandenhouten,et al.  Design and quality metrics of point patterns for coded structured light illumination with diffractive optical elements in optical 3D sensors , 2017, Other Conferences.