论文信息 - Formation of V-grooves on the (Al,Ga)N surface as means of tensile stress relaxation - 字舞流文

Formation of V-grooves on the (Al,Ga)N surface as means of tensile stress relaxation

H. Bender | G. Borghs | P. Favia | M. Germain | M. Leys | S. Degroote | K. Cheng