A novel vertical comb-drive electrostatic actuator using a one layer process

This paper presents the design, fabrication and testing of a new residual stress gradient based vertical comb-drive actuator. Conventional vertical comb-drive actuators need two structural layers, i.e. one for the moving fingers and a second for the fixed fingers. A vertical comb-drive actuator based on a single structural layer micromachining process, using the residual stress gradient along the thickness of the nickel of the MetalMUMPs (Metal Multi-User MEMS process) fabrication process, is developed. The MetalMUMPs provides a 20 μm thick nickel film and is subject to residual stress gradients along its thickness. Two curve-up beams are devised to curve out of plane after release. The curve-up beams raise a plate with comb fingers above the substrate to form the moving fingers. The fixed comb fingers are connected to the substrate via anchors. When a voltage is applied across the moving and the fixed fingers, the moving fingers move down towards the fixed fingers. Experimental measurements on prototypes have verified the design principle. A vertical displacement of 4.81 µm at 150 V was measured.