论文信息 - CO-AXIAL MULTICUSP SOURCE FOR LOW AXIAL ENERGY SPREAD ION BEAM PRODUCTION - 字舞流文

CO-AXIAL MULTICUSP SOURCE FOR LOW AXIAL ENERGY SPREAD ION BEAM PRODUCTION

M. Williams | J. Vujic | K. Leung | N. Zahir | R. Gough | Y. Lee

[1] M. Williams,et al. Production of low energy spread ion beams with multicusp sources , 1996 .

[2] D. Pickard,et al. Multicusp sources for ion beam lithography applications , 1995 .