Prototype of 6-DOF Magnetically Levitated Stage Based on Single Axis Lorentz force Actuator

We present a prototype of 6-DOF magnetically levitated stage based on single axis Lorentz force actuator is capable of positioning down to micron in several millimeter travel range with a simple and compact structure. The implementation of the Lorentz force actuators, instrument modeling, and motion controller of the maglev system are described. With the force-gap relationship of the actuator solved by Gaussian quadrature, 2-demsional (2D) lookup table is employed to store the result for the designing of control system. Based on the force-gap relationship, we choose the suitable stroke of each actuator to develop the stability of the maglev stage. Complete decoupling matrix is analyzed here to establish a decoupled dynamics between resulting six axis motion and eight outputs to the actuators. The design travel volume of the stage is 2mm×2mm×2mm in translation and 80mrad×80mrad×40mrad in rotation. With a constant gain and critical damping PID controller, the resolution of the translation is 2.8um and 4um root mean square in horizontal and vertical direction respectively. Experimental results are presented to illustrate the positioning fluctuations, step responds and multi axis motion. Some comparative tests are taken to highlight the advantage resulted from the accurate force-gap relationship, suitable stroke, and complete decoupling matrix.