Optical Angular Sensor for Space Applications

This paper describes a silicon/glass sensing structure for axial angle measurements. The presented optical angular sensor can statically measure the angle φ of any apparatus depending on the torsion of the optical component against the sensor housing. Core element of the sensor is an optical medium with an etched structure, which diffracts light from an LED according to the Fresnel equation. Two photodiodes, one for angle determination and one as reference, conduct the measurement. Hence, the signal splits up into two parts: one part transmits trough the optical system and the second part (the reflected wave) is used as reference signal. For self-referencing purposes, the wavelength spectrum of the LED has its maximum in the infrared regime near to the wavelength where silicon gets transparent (l~1000 nm). More precisely, torsion angle and light intensity show a dependency given by Tstot if a straight etching structure (refraction profile) is used. To avoid multiple reflections of light, a coating layer restricts the illuminated area in the optical medium. With this setting a resolution of 0.05-degree rotation angle has been achieved and by stacking the construction, the sensor can measure an angular range from 30° up to 270°.

[1]  K. Bücher,et al.  Absorption coefficient of silicon: An assessment of measurements and the simulation of temperature variation , 1994 .

[2]  Wei Gao,et al.  A Precision Angle Sensor Using a Multi-cell Photodiode Array , 2004 .

[3]  Alberto Cavallo,et al.  Optoelectronic joint angular sensor for robotic fingers , 2009 .

[4]  Rong-Seng Chang,et al.  High-sensitivity small-angle sensor based on surface plasmon resonance technology and heterodyne interferometry. , 2006, Applied optics.

[5]  Douglas B. Leviton,et al.  Temperature-dependent refractive index of silicon and germanium , 2006, SPIE Astronomical Telescopes + Instrumentation.

[6]  Birgit Wirtz,et al.  Optical Electronics In Modern Communications , 2016 .

[7]  Yihong Wu,et al.  Magnetic angular position sensor enabled by spin-orbit torque , 2018, Applied Physics Letters.

[8]  Robert Hull,et al.  Properties of Crystalline Silicon , 1999 .

[9]  R. Schellin,et al.  Surface micromachined bridge configurations for accurate angle measurements , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[10]  J. Brown,et al.  Angle sensor using spin valve with SAF structure , 2005, INTERMAG Asia 2005. Digests of the IEEE International Magnetics Conference, 2005..

[11]  Martin A. Green,et al.  Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients , 2008 .

[13]  Ruey-Ching Twu,et al.  Immersion-type KTP sensor for angular displacement measurement , 2019 .

[14]  B. George,et al.  A Flexible, Planar-Coil-Based Sensor for Through-Shaft Angle Sensing , 2018, IEEE Sensors Journal.

[15]  Prudence M.J.H. Wormell,et al.  Handbook of optical engineering , 2002 .