Film Bulk Acoustic Wave Resonator in Rf Filters

Film Bulk Acoustic Resonator (FBAR)is widely used as a RF filter in advanced wireless communication system because of its high-Quality Factor (Q)and low inband losses. FBAR is also widely used as a sensor for biomedical and physical sensing. This paper describes the basic concepts of FBAR, device architecture, and the topology used to design the filter. Furthermore, we have proposed the design of 3D-FBAR based on cavity device architecture which can be used to design a RF-filter. In this design, aluminum (A1)is used as a top as well as for the bottom electrode the top electrode is hexahedron in shape, aluminum nitride (AIN)as a piezoelectric and silicon (Si)is used as a substrate. The designed model is to analyses maximum pressure of FBAR in its operating region, the resonant frequency fr which is 2.76 GHz and anti-resonant frequency fa which is 2.78 GHz and Q-factor is 730.

[1]  S. Dong,et al.  Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer , 2015, Scientific Reports.

[2]  橋本 研也,et al.  RF bulk acoustic wave filters for communications , 2009 .

[3]  E. S. Kim,et al.  Mercury ion sensing by film-bulk-acoustic-resonator mass sensor , 2005, IEEE Sensors, 2005..

[4]  H.S. Bennett,et al.  Device and technology evolution for Si-based RF integrated circuits , 2005, IEEE Transactions on Electron Devices.

[5]  Brian Otis,et al.  Design of 1.8-mW PLL-Free 2.4-GHz Receiver Utilizing Temperature-Compensated FBAR Resonator , 2018, IEEE Journal of Solid-State Circuits.

[6]  Stepan Lucyszyn,et al.  Review of radio frequency microelectromechanical systems technology , 2004 .

[7]  M. Clement,et al.  Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators , 2018, European Frequency and Time Forum.

[8]  Yafei Zhang,et al.  Multilayer Integrated Film Bulk Acoustic Resonators , 2012 .

[9]  S. Saha,et al.  Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices , 2004 .

[10]  C. Nguyen,et al.  MEMS technology for timing and frequency control , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..

[11]  Nam-Trung Nguyen,et al.  Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications , 2017 .

[12]  Richard C. Ruby,et al.  An FBAR Circulator , 2017, IEEE Microwave and Wireless Components Letters.

[13]  D. Neculoiu,et al.  6.3-GHz Film Bulk Acoustic Resonator Structures Based on a Gallium Nitride/Silicon Thin Membrane , 2009, IEEE Electron Device Letters.