The development of thin film metrology by coherence scanning interferometry

Scanning White Light Interferometry (SWLI), now referred to as Coherence Scanning Interferometry (CSI), is established as a powerful tool for sub-nanometer surface metrology. The technique provides accurate and rapid three dimensional topographical analysis without contacting the surface under measurement. This paper will focus on recent developments of CSI using the Helical Complex Field (HCF) function that have extended its use for important thin film measurements. These developments now enable CSI to perform thin film thickness measurements, to measure the surface profile and the interfacial surface roughness of a buried interface and to derive optical constants (index of refraction n and extinction coefficient K).

[1]  P. Kamiński,et al.  Refractive index determination by coherence scanning interferometry. , 2016, Applied optics.

[2]  S. W. Kim,et al.  Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry. , 1999, Applied optics.

[3]  B. Maniscalco,et al.  Thin film thickness measurements using Scanning White Light Interferometry , 2014 .

[4]  K Itoh,et al.  Analysis of the phase unwrapping algorithm. , 1982, Applied optics.

[5]  Young-Sik Ghim,et al.  Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure. , 2009, Applied optics.

[6]  R K Leach,et al.  Guide to the measurement of smooth surface topography using coherence scanning interferometry. , 2008 .

[7]  Young-Sik Ghim,et al.  Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry. , 2006, Optics express.

[8]  김기홍,et al.  Method for measuring a thickness profile and a refractive index using white-light scanning interferometry and recording medium therefor , 2000 .

[9]  J. Wyant,et al.  Field Guide to Interferometric Optical Testing , 2006 .

[10]  Joanna Schmit,et al.  Spectrally resolved white-light phase-shifting interference microscopy for thickness-profile measurements of transparent thin film layers on patterned substrates. , 2006, Optics express.

[11]  Sanjit K Debnath,et al.  Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate. , 2010, Applied optics.

[12]  황보창권.  THIN-FILM OPTICAL FILTERS(Third Edition, IoP, 2001)-H. Angus Macleod , 2007 .

[13]  Leslie L. Deck,et al.  Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain , 1995 .

[14]  Daniel Mansfield,et al.  Extraction of film interface surfaces from scanning white light interferometry , 2008, Optical Systems Design.

[15]  Daniel Mansfield,et al.  The distorted helix: thin film extraction from scanning white light interferometry , 2006, SPIE Photonics Europe.

[16]  R. Leach.  Optical measurement of surface topography , 2011 .

[17]  Maitreyee Roy,et al.  Interferometric surface profiling with white light: effects of surface films , 1996 .

[18]  Mihai Catalin Arva,et al.  Frequency domain analysis , 2016, 2016 8th International Conference on Electronics, Computers and Artificial Intelligence (ECAI).

[19]  J. Bennett,et al.  Stylus profiling instrument for measuring statistical properties of smooth optical surfaces. , 1981, Applied optics.