Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics
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Sung-Jin Park | J. Eden | P. P. Sun | Wenyuan Chen | Jinhong Kim | A. Mironov | J. Cho | C. M. Herring | Z. Liang | Sehyun Park | Dane S. Sievers