From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications

From Traditional Manufacturing to Nanotechnology: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared. Nature as an Engineering Guide Biomimetics. Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared. Packaging, Assembly, and Self-Assembly. Selected Materials and Processes for MEMS and NEMS. Metrology and MEMS/NEMS Modeling. Scaling Laws, Actuators, and Power and Brains in Miniature Devices: Scaling Laws. Actuators. Power and Brains in Miniature Devices. Miniaturization Application: MEMS and NEMS Applications.