论文信息 - Accuracy of profile measurements by means of a focused laser beam

Accuracy of profile measurements by means of a focused laser beam

Abstract Results of studies of the metrological feasibilities of an optical method that uses a focused laser beam are presented. The analysis is based on the statistical comparison of the results of roughness measurements carried out by means of optical and stylus profilometers.

Marek Dobosz

[1] Tony Wilson,et al. Surface profile measurement using the confocal microscope , 1982 .

[2] M Dobosz. Optical profilometer: a practical approximate method of analysis. , 1983, Applied optics.

[3] Yeshaiahu Fainman,et al. Optical profilometer: a new method for high sensitivity and wide dynamic range. , 1982, Applied optics.

[4] K. G. Beauchamp,et al. Signal Processing Using Analog and Digital Techniques , 1976, IEEE Transactions on Systems, Man, and Cybernetics.

[5] F. T. Arecchi,et al. A fast versatile optical profilometer , 1979 .