Overview of microelectromechanical systems and design processes

New design tools and automation strategies are neededto create robust, cost-effective, and manufacturable micro-machineddevices and systems. Some of the design automationissues include mixed-technology simulation, materialproperty prediction in the micron-size regime, self-consistencyin coupled electromechanical devices, integratedmodeling environment, micro-fluid modeling, and synthesisof device geometries and process flows. Advancement inthese areas will path the way to full-scale maturity of theMEMS field.

[1]  K. Wise,et al.  An IC piezoresistive pressure sensor for biomedical instrumentation. , 1973, IEEE transactions on bio-medical engineering.

[2]  C. Mastrangelo,et al.  The automatic synthesis of planar fabrication process flows for surface micromachined devices , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[3]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[4]  W. P. Maszara.  Silicon-On-Insulator by Wafer Bonding: A Review , 1991 .

[5]  H. Sandmaier,et al.  Corner compensation techniques in anisotropic etching of , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[6]  Jacob K. White,et al.  A coupled numerical technique for self-consistent analysis of micro-electro-mechanical-systems , 1996 .

[7]  S. Imai,et al.  Miniaturised friction force measuring system for tribological research on magnetic storage devices , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[8]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[9]  H. Tilmans,et al.  Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms , 1994 .

[10]  L.M. Roylance,et al.  A batch-fabricated silicon accelerometer , 1979, IEEE Transactions on Electron Devices.

[11]  J. R. Webster,et al.  Monolithic capillary gel electrophoresis stage with on-chip detector , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.