Science and technology of ultra clean systems

The author argues that the semiconductor industry has grown as a result of borrowing a number of basic technologies from other fields. However, it is now time that the industry develop its own technologies for semiconductor manufacturing. In order to integrate a variety of technology fields, where terminologies are so different from one field to the other, into advanced semiconductor technology, a clearly stated leading principle is needed. Ultraclean technology as a leading principle is examined, and ultraclean processing technology is outlined.<<ETX>>