Wireless Calibration of a Surface Acoustic Wave Resonator as a Strain Sensor

In this paper, calibration data for a single one-port surface acoustic wave (SAW) resonator strain sensor fabricated on 36° (AT) quartz is presented. This substrate was chosen as it is traditionally associated with temperature stability in SAW resonator design. To investigate the sensor as a general-purpose strain sensing element the sensors were bonded using standard adhesives and calibrated using a special-purpose test apparatus and a repeatable testing methodology. Bonding effects and thermal sensitivities are empirically investigated. Longitudinal and transverse strain sensitivities at a range of temperatures are presented as well as the variation in sensor sensitivity as function of alignment angle to applied strain.

[1]  A. Pohl,et al.  Wireless sensing using oscillator circuits locked to remote high-Q SAW resonators , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[2]  V. Kalinin,et al.  Pulsed interrogation of the SAW torque sensor for electrical power assisted steering , 2004, IEEE Ultrasonics Symposium, 2004.

[3]  Brian Mc Cormack,et al.  Design, manufacture, modelling and testing of surface acoustic wave strain sensors , 2008 .

[4]  B. Sinha,et al.  Acceleration and Vibration Sensitivity of SAW Devices , 1987, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[5]  G. Scholl,et al.  Theory and application of passive SAW radio transponders as sensors , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  Carlos H. F. Alves,et al.  Design, fabrication, and evaluation of high frequency, single-element transducers incorporating different materials , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[7]  V. Kalinin,et al.  Passive wireless strain and temperature sensors based on SAW devices , 2004, Proceedings. 2004 IEEE Radio and Wireless Conference (IEEE Cat. No.04TH8746).

[8]  Colin Campbell,et al.  Surface Acoustic Wave Devices for Mobile and Wireless Communications , 1998 .

[9]  M. Epstein,et al.  Surface acoustic waves in strained media , 1976 .

[10]  D. Geraghty,et al.  Modeling of surface acoustic wave strain sensors using coupling-of-modes analysis , 2011, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[11]  W. Daniau,et al.  Measuring the inner body temperature using a wireless temperature SAW-sensor-based system , 2005, IEEE Ultrasonics Symposium, 2005..

[12]  Y. Kim,et al.  Packaging Effect on MEMS Pressure Sensor Performance , 2007, IEEE Transactions on Components and Packaging Technologies.

[13]  Mohd Nizar Hamidon,et al.  High-temperature 434 Mhz surface acoustic wave devices based on GaPO4. , 2006, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[14]  V. Kalinin,et al.  Development of a calibration procedure for contactless torque and temperature sensors based on SAW resonators , 2008, 2008 IEEE Ultrasonics Symposium.

[15]  J.F. Diaz,et al.  The Temperature Coefficient of Delay-Time for X-Propagating Acoustic Surface-Waves on Rotated Y-Cuts of Alpha Quartz , 1975, IEEE Transactions on Sonics and Ultrasonics.

[16]  Susan C. Mantell,et al.  Calibration of MEMS strain sensors fabricated on silicon: theory and experiments , 2001 .

[17]  Xin Zhang,et al.  Accurate Assessment of Packaging Stress Effects on MEMS Sensors by Measurement and Sensor–Package Interaction Simulations , 2007, Journal of Microelectromechanical Systems.

[18]  W. Buff,et al.  High-temperature 434 MHz surface acoustic wave devices based on GaPO/sub 4/ , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[19]  R. H. Tancrell,et al.  Acoustic surface wave filters , 1971 .

[20]  V. Kalinin,et al.  Non-contact torque sensors based on SAW resonators , 2002, Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234).

[21]  V. Kalinin,et al.  A Second Generation In-Car Tire Pressure Monitoring System Based on Wireless Passive SAW Sensors , 2006, 2006 IEEE International Frequency Control Symposium and Exposition.

[22]  L. Rayleigh.  On Waves Propagated along the Plane Surface of an Elastic Solid , 1885 .