Evaluation of the micro wobble motor fabricated by concentric build-up process

We proposed a CB (concentric build-up) process to fabricate the electrostatic wobble motors in MEMS '94[ 11. This process features the concentric build-up of layers around a cylindrical substrate and produces three dimensional bulk structures using newly developed microfabrication technique. This time, we have successfully measured the wobbling motion and estimated key motor parameters such as rotation rate, rotor-stator gap, output torque and surface condition of stator and rotor. This method facilitated the evaluation of the motors and processes. And we have located the causes of torque deterioration.

[1]  R. Mahadevan.  Analytical modelling of electrostatic structures , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[2]  A concentric build-up process to fabricate practical wobble motors , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[3]  J. Lang,et al.  A comparative study of bearing designs and operational environments for harmonic side-drive micromotors , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[4]  A comparative study of bearing designs and operational environments for harmonic side-drive micromotors , 1993 .

[5]  R. Reuben,et al.  Friction measurements on LIGA-processed microstructures , 1994 .

[6]  Ulrike Wallrabe,et al.  Design rules and test of electrostatic micromotors made by the LIGA process , 1994 .