论文信息 - Post-CMOS electrode formation and isolation for on-chip temperature-controlled electrochemical sensors

Post-CMOS electrode formation and isolation for on-chip temperature-controlled electrochemical sensors

A low-cost post-CMOS fabrication process enabling the formation of thermally controlled and isolated microelectrode array sites suitable for biomimetic and bioelectronic protein attachment on existing CMOS circuitry has been developed and implemented in the fabrication of an electrochemical array system for biosensing applications.

Andrew J. Mason | N. Trombly

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