Improvement of sensing and actuating property of parallel beam gyroscope

Parallel beam structure has many significant features as follows: the tip moves in parallel at the end; the structure converts small displacements into large strain; strain is concentrated at the boundary point between the parallel-beam part and the supporting part; interfere between the units is reduced; lateral rigidity is high. The authors propose this structure for the development of a piezoelectric vibrating gyroscope (angular rate sensor), and detection of the angular rate using this gyroscope. The method for super sensitizing by bringing two resonance frequencies (drive resonance frequency and sensing resonance frequency) close, is presented. A suppression method for mechanical coupling that arises by bringing two resonance frequencies close, is described. It is concluded that the structure described is suitable for the gyroscope.

[1]  Kenji Uchino,et al.  Piezoelectric Actuators and Ultrasonic Motors , 1996 .

[2]  Yotaro Hatamura,et al.  A trial on a 6-axis force sensor for robots. , 1988 .

[3]  Fumihito Arai,et al.  Parallel beam micro sensor/actuator unit using PZT thin films and its application examples , 1998, Proceedings. 1998 IEEE International Conference on Robotics and Automation (Cat. No.98CH36146).

[4]  Fumihito Arai,et al.  Analysis of parallel beam gyroscope , 1999, Proceedings 1999 IEEE International Conference on Robotics and Automation (Cat. No.99CH36288C).

[5]  S. Fujishima,et al.  Piezoelectric vibratory gyroscope using flexural vibration of a triangular bar , 1991, Proceedings of the 45th Annual Symposium on Frequency Control 1991.

[6]  Fumihito Arai,et al.  New PZT actuator using piezoelectric thin film on parallel plate structure , 1997, 1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311).

[7]  Yotaro Hatamura,et al.  Development of a pin-type loadcell. , 1988 .

[8]  Yotaro Hatamura,et al.  平行平板形研削動力計に関する-考察(第2報) , 1982 .