High duty factor nitrogen RFQ as a prototype high current implanter
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[1] H. Klein,et al. An Implantation System for MeV-mA Ion-Beams , 1993 .
[2] R. Thomae. Recent developments in ion implantation accelerators , 1990 .
暂无分享,去创建一个
[1] H. Klein,et al. An Implantation System for MeV-mA Ion-Beams , 1993 .
[2] R. Thomae. Recent developments in ion implantation accelerators , 1990 .