Novel fine-tuned model-based SRAF generation method using coherence map

We have developed the comprehensive sub-resolution assist features (SRAFs) generation method based upon the modulation of the coherence map. The method has broken through the trade-off relation between processing time and accuracy of the SRAF generation. We have applied this method to a real device layout and the average of Process Variation band width (PV band width) has improved to 40% without any processing time loss.

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