论文信息 - A molecular dynamics model for the interaction of energetic ions with SiOCH low-κ dielectric - 字舞流文

A molecular dynamics model for the interaction of energetic ions with SiOCH low-κ dielectric

S. Rauf | P. Ventzek | K. G. Gaynullin | V. Smirnov | A. V. Sten’gach | V. Pavlovsky