论文信息 - Synthesis of SiO2 and SiOxCyHz thin films by microwave plasma CVD - 字舞流文

Synthesis of SiO2 and SiOxCyHz thin films by microwave plasma CVD

C. Clerc | F. Yubero | J. P. Espinós | J. Cotrino | Á. Barranco | A. González‐Elipe | J. Benı́tez | J. Espinós

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