Fabrication of three-dimensional photonic crystals with multilayer photolithography

We have developed a new approach for the fabrication of three-dimensional photonic crystals based on multi-layer photolithography. This method, which uses commercially available photoresist, allows parallel fabrication of three-dimensional photonic crystals, and possesses the flexibility to create a variety of different lattice arrangements and the freedom of arbitrary defect introduction. We describe in this work how this method is derived from mature two-dimensional photolithography and demonstrate it with the fabrication of multi-layer woodpile structures with and without defects as well as other unique three-dimensional microstructures.

[1]  T. Gmitter,et al.  Inhibited and enhanced spontaneous emission from optically thin AlGaAs/GaAs double heterostructures. , 1988, Physical review letters.

[2]  J. Sturm,et al.  On-chip natural assembly of silicon photonic bandgap crystals , 2001, Nature.

[3]  Seth R. Marder,et al.  Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication , 1999, Nature.

[4]  Jean-Michel Lourtioz,et al.  Submicrometer resolution Yablonovite templates fabricated by x-ray lithography , 2000 .

[5]  Masaya Notomi,et al.  Superprism phenomena in photonic crystals: toward microscale lightwave circuits , 1999 .

[6]  E. Yablonovitch,et al.  Photonic band structure: The face-centered-cubic case. , 1989, Physical review letters.

[7]  John,et al.  Strong localization of photons in certain disordered dielectric superlattices. , 1987, Physical review letters.

[8]  R. K. Yonkoski,et al.  Model for spin coating in microelectronic applications , 1992 .

[9]  Bradley K. Smith,et al.  A three-dimensional photonic crystal operating at infrared wavelengths , 1998, Nature.

[10]  Masaya Notomi,et al.  Self-collimating phenomena in photonic crystals , 1999 .

[11]  Jeremy Witzens,et al.  Self-collimation in planar photonic crystals , 2002 .

[12]  S. Noda,et al.  Full three-dimensional photonic bandgap crystals at near-infrared wavelengths , 2000, Science.

[13]  R. G. Denning,et al.  Fabrication of photonic crystals for the visible spectrum by holographic lithography , 2000, Nature.

[14]  Dennis W. Prather,et al.  Multilayer three-dimensional photolithography with traditional planar method , 2004 .