Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy

Correlated force and contact resonance versus displacement responses have been resolved using load-dependent contact-resonance atomic force microscopy (AFM) to determine the elastic modulus of low-k dielectric thin films. The measurements consisted of recording simultaneously both the deflection and resonance frequency shift of an AFM cantilever probe as the probe was gradually brought in and out of contact. As the applied forces were restricted to the range of adhesive forces, low-k dielectric films of elastic modulus varying from GPa to hundreds of GPa were measurable in this investigation. Over this elastic modulus range, the reliability of load-dependent contact-resonance AFM measurements was confirmed by comparing these results with those from picosecond laser acoustic measurements.

[1]  Robert F. Cook,et al.  Indentation fracture of low-dielectric constant films: Part I. Experiments and observations , 2008 .

[2]  R. Cook,et al.  Surface effects on the elastic modulus of Te nanowires , 2008 .

[3]  R. Cook,et al.  Mapping the elastic properties of granular Au films by contact resonance atomic force microscopy , 2008, Nanotechnology.

[4]  S. Solares,et al.  Dual frequency modulation with two cantilevers in series: a possible means to rapidly acquire tip–sample interaction force curves with dynamic AFM , 2008 .

[5]  F. Degertekin,et al.  Quantitative mechanical characterization of materials at the nanoscale through direct measurement of time-resolved tip–sample interaction forces , 2008, Nanotechnology.

[6]  S. Seal,et al.  Surface elastic properties of porous nanosilica coatings by scanning force microscopy , 2007 .

[7]  Olav Solgaard,et al.  An atomic force microscope tip designed to measure time-varying nanomechanical forces , 2007, Nature Nanotechnology.

[8]  B. C. Daly,et al.  Characterization of Mechanical and Thermal Properties Using Ultrafast Optical Metrology , 2006 .

[9]  Ratnasingham Sooryakumar,et al.  Brillouin light scattering studies of the mechanical properties of ultrathin low-k dielectric films , 2006 .

[10]  R. Geiss,et al.  Contact mechanics and tip shape in AFM-based nanomechanical measurements. , 2006, Ultramicroscopy.

[11]  S. Gates,et al.  Detection of open or closed porosity in low-κ dielectrics by solvent diffusion , 2005 .

[12]  A. Grill,et al.  Nanoindentation analysis of mechanical properties of low to ultralow dielectric constant SiCOH films , 2005 .

[13]  Joseph A. Turner,et al.  Atomic force acoustic microscopy methods to determine thin-film elastic properties , 2003 .

[14]  H. Hölscher,et al.  Measurement of three-dimensional force fields with atomic resolution using dynamic force spectroscopy , 2002 .

[15]  Mathias Göken,et al.  Imaging and measurement of local mechanical material properties by atomic force acoustic microscopy , 2002 .

[16]  B. Gotsmann,et al.  Dynamic force spectroscopy of conservative and dissipative forces in an Al-Au(111) tip-sample system. , 2001, Physical review letters.

[17]  T. Mayer,et al.  Thin film and surface characterization by specular X-ray reflectivity , 1997 .

[18]  Ute Rabe,et al.  Vibrations of free and surface‐coupled atomic force microscope cantilevers: Theory and experiment , 1996 .

[19]  Kazushi Yamanaka,et al.  Ultrasonic Atomic Force Microscope with Overtone Excitation of Cantilever , 1996 .

[20]  Oleg Kolosov,et al.  Nonlinear Detection of Ultrasonic Vibrations in an Atomic Force Microscope , 1993 .

[21]  Joost J. Vlassak,et al.  Indentation modulus of elastically anisotropic half spaces , 1993 .

[22]  R. Cook,et al.  Force measurement using an ac atomic force microscope , 1990 .

[23]  P. Couturier.  Japan , 1988, The Lancet.

[24]  Gerber,et al.  Atomic force microscope. , 1986, Physical review letters.

[25]  B. V. Derjaguin,et al.  Effect of contact deformations on the adhesion of particles , 1975 .

[26]  K. Kendall,et al.  Surface energy and the contact of elastic solids , 1971, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.