论文信息 - Processing and moisture effects on TDDB for Cu/ULK BEOL structures - 字舞流文

Processing and moisture effects on TDDB for Cu/ULK BEOL structures

Stephan A. Cohen | S. Gates | D. Canaperi | E. Liniger | T. Shaw | S. Cohen | G. Bonilla | S. P. Rao | Pak Leung | P. Leung | T. Shaw

[1] Tony F. Heinz,et al. Photocurrent spectroscopy of low-k dielectric materials: Barrier heights and trap densities , 2008 .

[2] Egon Matijević,et al. Chemistry of silica , 1980 .