Properties of tantalum oxide thin films grown by atomic layer deposition
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Jaan Aarik | Teet Uustare | Kaupo Kukli | Väino Sammelselg | K. Kukli | J. Aarik | A. Aidla | T. Uustare | V. Sammelselg | Aleks Aidla | Oksana Kohan | Oksana Kohan
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