THz Detection by Thermopile Antenna

Abstract A novel MEMS thermopile structure is presented, which consist of linearly arranged p- and n- type polysilicon strips instead of the conventional loop-like configuration. It is shown that these devices sense the millimeter wave radiation beyond the infrared. The polarity and frequency dependence of the sensitivity prove that these strips behave as absorbing antennas towards the microwave/millimeter wave radiation. The measured responsitivities to direct heating, infrared radiation, 13 GHz microwave radiation, 100 GHz millimeter-wave and THz radiation are presented.