A 160 µA, 8 mdps/√Hz frequency-modulated MEMS yaw gyroscope

This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 µA), low-phase-noise (−135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 µm)<sup>2</sup> z-axis MEMS sensor fabricated in a 24-µm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/<inf>√</inf>Hz, both independent of process nonuniformities.

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