Towards automated AFM-based nanomanipulation in a combined nanorobotic AFM/HRSEM/FIB system

In this paper, the semi-automated AFM-based nanomanipulation of silica spheres with a radius of 550 nm is presented. A combined AFM/HRSEM/FIB system is used to facilitate the SEM vision-based pick-and-place handling with haptic feedback. Object recognition and tracking algorithms are described supporting the automated localization of micro-and nanospheres. Automated alignment of source and target sample positions is realized to support fast exchange of different substrates and to speed up the pick-and-place procedure. The integration of a haptic feedback device allows for intuitive AFM-based nanomanipulation with force feedback. The silica spheres are assembled into 2×2 μm arrays for applications in infrared spectroscopy.

[1]  Gerber,et al.  Atomic Force Microscope , 2020, Definitions.

[2]  Daniel,et al.  Towards automated robotic nanomanipulation systems , 2009, AIM 2009.

[3]  Lixin Dong,et al.  Piezoresistivity characterization of silicon nanowires using a MEMS device , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[4]  Tim Wortmann,et al.  Fusion of AFM and SEM scans , 2009, 2009 International Symposium on Optomechatronic Technologies.

[5]  Sergej Fatikow,et al.  Combined nanorobotic AFM/SEM system as novel toolbox for automated hybrid analysis and manipulation of nanoscale objects , 2010, 2010 IEEE International Conference on Robotics and Automation.

[6]  Russell M. Taylor,et al.  Controlled placement of an individual carbon nanotube onto a microelectromechanical structure , 2002 .

[7]  Patrik Hoffmann,et al.  Gas-assisted focused electron beam and ion beam processing and fabrication , 2008 .

[8]  Gregory A. Dahlen,et al.  Tip characterization and surface reconstruction of complex structures with critical dimension atomic force microscopy , 2005 .

[9]  T. Yamaura,et al.  Image-based autonomous micromanipulation system for arrangement of spheres in a scanning electron microscope , 2004 .

[10]  Hui Xie,et al.  A versatile atomic force microscope for three-dimensional nanomanipulation and nanoassembly , 2009, Nanotechnology.

[11]  J. H. Makaliwe,et al.  Manipulation of nanoscale components with the AFM: principles and applications , 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).

[12]  D. Jasper,et al.  Towards automated robotic nanomanipulation systems , 2009, 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[13]  Daisuke Saya,et al.  Measurement of mechanical properties of three-dimensional nanometric objects by an atomic force microscope incorporated in a scanning electron microscope , 2002 .

[14]  Toshio Fukuda,et al.  Nanofabrication, Nanoinstrumentation and Nanoassembly by Nanorobotic Manipulation , 2009, Int. J. Robotics Res..

[15]  Sergej Fatikow.  Automated nanohandling by microrobots , 2008 .

[16]  Rong Wang,et al.  Tip Based Nanomanipulation Through Successive Directional Push , 2010 .

[17]  C D Onal,et al.  Automated 2-D Nanoparticle Manipulation Using Atomic Force Microscopy , 2011, IEEE Transactions on Nanotechnology.

[18]  Xiaoping Qian,et al.  Tip Based Nano Manipulation Through Successive Directional Push , 2010 .

[19]  A. Ardeshir Goshtasby,et al.  A Two-Stage Cross Correlation Approach to Template Matching , 1984, IEEE Transactions on Pattern Analysis and Machine Intelligence.