In situ removal of a native oxide layer from an amorphous silicon surface with a UV laser for subsequent layer growth
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T. Teubner | K. Hinrichs | T. Boeck | S. Kayser | R. Bansen | C. Ehlers | T. Markurt | O. Ernst | D. Uebel
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T. Teubner | K. Hinrichs | T. Boeck | S. Kayser | R. Bansen | C. Ehlers | T. Markurt | O. Ernst | D. Uebel