Tracking Control MethodofPiezoelectric Actuator for Compensating Hysteresis andCreep

Piezoelectric actuators areaclass ofsmarttransducers witha greatpotential formany micro-nanometer motion applications. A majorchallenge forthepiezoelectric actuators exists inthecontrol ofsuchultra-precision motions, whichare oftenseriously influenced by theintrinsic behaviors of piezoelectric material likenon-linearity, hysteresis andcreep. Basedonaproposed hysteresis-creep model, this paperpresents anewtracking control algorithm toimprove thepositioning and tracking performances ofa linear multilayer piezoelectric actuator. Inthisalgorithm, afeedforward inverse controller is designed according to thehysteresis and creepmodelof piezoelectric actuator. Themethodofinverse modelofhysteresis- creepisexplained detailedly. Thetracking control methodis applied toan experimental piezoelectric actuator systemto demonstrate itsefficacy, and the experimental results demonstrate thatbothhysteresis andcreepphenomenaare effectively canceled and accuratetracking ofa reference trajectory isachieved inopen-loop operation. Keywords-hysteresis;