Study on Structure and Detecting Technique of Micro-accelerometer

Capacitive accelerometer with sandwich structure may not work well because of capacitive asymmetry caused by local defect.The local defect may be caused during fabrication process or some other reasons.The popular detecting method is not effective in identifying this kind of hard-to-detect defects.This paper designed a micro-accelerometer with self-test function.This kind of micro-accelerometer can test the symmetry of the structure by detecting circuit easily.In the detecting circuit,MS3110 which was designed for testing capacitive and the single-chip was used to change parameters inside MS3110 to ensure it work in an area with good linearity and sensitivity.The result shows that the micro-accelerometer has good symmetry.