论文信息 - Fabrication and Evaluation of MEMS Piezoelectric Vibration Sensor with Energy Harvesting Function

Fabrication and Evaluation of MEMS Piezoelectric Vibration Sensor with Energy Harvesting Function

We are going to introduce a MEMS piezoelectric vibration sensor with energy harvesting function. By 8-inch MEMS fabrication line, the piezoelectric sensors were fabricated successfully. The mechanical and electrical performance of the given sensors with different design were measured comprehensively. Endurance test of temperature circles was finished and the results demonstrated that the sensor can keep a stable output for reasonable performance after severe test. Finally, case studies of given sensor are implemented for considering the potential applications.

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