Materials issues in microelectromechanical devices: science, engineering, manufacturability and reliability

MicroElectroMechanical Systems (MEMS) technology offers considerable potential throughout the manufacturing sector, because of certain intrinsic advantages in terms of low cost, reliability, and small size. Relatively simple MEMS are used in applications ranging from automobile air bag sensors to electronic games. Considerably more complex devices have been designed for defense applications, for which government funding is available; however, the fledgling industry suffers from insufficient knowledge of materials physics at micrometer size and from the fact that currently commercialized MEMS devices are designed for specialized and rather disparate purposes, do not have a broad user base, and therefore have not generated industry standards or the design and process software that would be built upon those industry standards. In addition to industry standards, further advances in MEMS technology require a more complete understanding of the physics underlying performance and reliability. The first half of this paper reviews general issues related to fabrication and commercialization; the second half addresses the technical materials issues that relate to MEMS performance and reliability.

[1]  James H. Smith,et al.  Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures , 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[2]  J. Lang,et al.  Micromotor fabrication , 1992 .

[3]  Michael Thomas Dugger,et al.  Friction and wear in surface-micromachined tribological test devices , 1997, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[4]  R. Howe,et al.  Lubrication of polysilicon micromechanisms with self-assembled monolayers , 1998 .

[5]  A. Ulman,et al.  Ultrathin organic films: From Langmuir-Blodgett to self assembly , 1991 .

[6]  Koshi Adachi,et al.  Wear map of ceramics , 1997 .

[7]  R. D. Nasby,et al.  Application of chemical-mechanical polishing to planarization of surface-micromachined devises , 1996 .

[8]  Christopher W. Dyck,et al.  Supercritical carbon dioxide extraction of solvent from micromachined structures , 1995 .

[9]  T. Michalske,et al.  Adhesion hysteresis of silane coated microcantilevers , 2000 .

[10]  M. Stevens,et al.  Friction between Alkylsilane Monolayers: Molecular Simulation of Ordered Monolayers , 2002 .

[11]  M. Gardos.  Surface chemistry-controlled tribological behavior of silicon and diamond , 1996 .

[12]  A. Sunol,et al.  Supercritical fluids : extraction and pollution prevention , 1997 .

[13]  R. Maboudian,et al.  Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer , 2001 .

[14]  Hertz.  On the Contact of Elastic Solids , 1882 .

[15]  Roger T. Howe,et al.  Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS , 2001 .

[16]  Roger T. Howe,et al.  The effect of release-etch processing on surface microstructure stiction , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[17]  T. Christenson,et al.  Fabrication of micromechanical devices from polysilicon films with smooth surfaces , 1989 .

[18]  K. J. Gabriel,et al.  In situ friction and wear measurements in integrated polysilicon mechanisms , 1990 .

[19]  Chun‐Sing Lee,et al.  Dry release for surface micromachining with HF vapor-phase etching , 1997 .

[20]  R. Prasad,et al.  Micro-instrumentation For Tribological Measurement , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[21]  R. Wolffenbuttel,et al.  Dry release of metal structures in oxygen plasma: process characterization and optimization , 1998 .

[22]  Farshid Raissi,et al.  The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers , 1990 .

[23]  James G. Fleming,et al.  W-coating for MEMS , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[24]  W. Ko,et al.  Static friction of diamond-like carbon film in MEMS , 1992 .

[25]  D. M. Tanner,et al.  The effect of humidity on the reliability of a surface micromachined microengine , 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).

[26]  F. Rondelez,et al.  Silanization of Solid Substrates: A Step Toward Reproducibility , 1994 .

[27]  J. Sniegowski,et al.  IC-Compatible Polysilicon Surface Micromachining , 2000 .

[28]  Michael J. McNallan,et al.  Formation of Cylindrical Sliding-Wear Debris on Silicon in Humid Conditions and Elevated Temperatures , 1995 .

[29]  R. Schulz,et al.  Oxidation of HF-treated Si wafer surfaces in air , 1990 .

[30]  B. V. Derjaguin,et al.  Effect of contact deformations on the adhesion of particles , 1975 .

[31]  J. Krim,et al.  Measuring nanomechanical properties of a dynamic contact using an indenter probe and quartz crystal microbalance , 2001 .

[32]  Michael Thomas Dugger,et al.  Degradation of monolayer lubricants for MEMS , 2003, SPIE MOEMS-MEMS.

[33]  Jack Martin.  Surface Characteristics of Integrated MEMS in High-Volume Production , 2003 .

[34]  S. George,et al.  Adsorption and desorption kinetics of H2O on a fully hydroxylated SiO2 surface , 1996 .

[35]  William C. Tang,et al.  Laterally Driven Polysilicon Resonant Microstructures , 1989 .

[36]  Brian D. Jensen,et al.  Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS , 2001 .

[37]  E. Irene,et al.  An in situ Study of Aqueous HF Treatment of Silicon by Contact Angle Measurement and Ellipsometry , 1988 .

[38]  M. Madou.  Fundamentals of microfabrication : the science of miniaturization , 2002 .

[39]  K. Kendall,et al.  Surface energy and the contact of elastic solids , 1971, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[40]  J. Connally,et al.  Slow Crack Growth in Single-Crystal Silicon , 1992, Science.

[41]  T. Michalske,et al.  Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems , 2000 .

[42]  J. Israelachvili,et al.  Adhesion and short-range forces between surfaces. Part I: New apparatus for surface force measurements , 1990 .

[43]  R. Howe,et al.  Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines , 1998 .

[44]  R. Muller,et al.  IC-processed electrostatic micromotors , 1989 .

[45]  Yu-Chong Tai,et al.  IC-processed electrostatic synchronous micromotors , 1989 .

[46]  Thomas Edward Buchheit,et al.  Size and Frequency of Defects in Silicon MEMS , 2002 .

[47]  Eric A. Stach,et al.  Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems , 2002 .

[48]  Stephen W. Freiman,et al.  A molecular interpretation of stress corrosion in silica , 1982, Nature.

[49]  Maarten P. de Boer,et al.  The impact of solution agglomeration on the deposition of self-assembled monolayers , 2000 .

[50]  M. Salmeron,et al.  Scratching the Surface: Fundamental Investigations of Tribology with Atomic Force Microscopy. , 1997, Chemical reviews.

[51]  D. M. Tanner,et al.  The effect of frequency on the lifetime of a surface micromachined microengine driving a load , 1998, 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173).

[52]  R. Dutton,et al.  Characterization of contact electromechanics through capacitance-voltage measurements and simulations , 1999 .

[53]  M. Salmeron,et al.  High-Resolution Imaging of Liquid Structures: Wetting and Capillary Phenomena at the Nanometer Scale , 1997 .

[54]  Jeremy A. Walraven,et al.  Characterization of an inchworm actuator fabricated by polysilicon surface micromachining , 2001, SPIE MOEMS-MEMS.

[55]  Robert O. Ritchie,et al.  Cyclic Fatigue of Ceramics , 1991 .

[56]  Chang-Jin Kim,et al.  Comparative evaluation of drying techniques for surface micromachining , 1998 .

[57]  C. Hsu,et al.  Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments , 1993 .

[58]  S. J. Glass,et al.  Strength Testing and Fractography of MEMS Materials , 2000 .

[59]  M.T. Dugger,et al.  Measuring and modeling electrostatic adhesion in micromachines , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[60]  Michael Hietschold,et al.  Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .

[61]  C. Mastrangelo.  Adhesion-related failure mechanisms in micromechanical devices , 1997 .

[62]  H. Pickering.  A Review of the Mechanism and Kinetics of Electrochemical Hydrogen Entry and Degradation of Metallic Systems , 1990 .

[63]  Roger T. Howe,et al.  Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces , 1997 .

[64]  J. Israelachvili.  Intermolecular and surface forces , 1985 .

[65]  Richard M. White,et al.  Polysilicon microstructures to characterize static friction , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[66]  G. M. Jamison,et al.  Alkylene-bridged polysilsesquioxane aerogels: highly porous hybrid organic-inorganic materials , 1995 .

[67]  H. Tilmans,et al.  Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms , 1994 .

[68]  M. Watanabe,et al.  The role of atmospheric oxygen and water in the generation of water marks on the silicon surface in cleaning processes , 1989 .

[69]  C. Hsu,et al.  Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory , 1993 .

[70]  Robert W. Carpick,et al.  Measurement of interfacial shear (friction) with an ultrahigh vacuum atomic force microscope , 1996 .

[71]  B. Bhushan,et al.  The sliding friction and wear behavior of single-crystal, polycrystalline and oxidized silicon , 1994 .

[72]  Alan B. Tutein,et al.  Role of Defects in Compression and Friction of Anchored Hydrocarbon Chains on Diamond , 2000 .

[73]  Timothy J. Hogan,et al.  Burn-in test reduction for the Digital Micromirror Device (DMD) , 2003, SPIE MOEMS-MEMS.

[74]  L. Cook.  Chemical processes in glass polishing , 1990 .

[75]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .

[76]  Tadahiro Ohmi,et al.  Control Factor of Native Oxide Growth on Silicon in Air or in Ultrapure Water , 1989 .