Sub-100 nm gate length metal gate NMOS transistors fabricated by a replacement gate process
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G.A. Brown | A. Chatterjee | M. Rodder | D. Rogers | Q. He | S.J. Fang | R.A. Chapman | G. Dixit | J. Kuehne | S. Hattangady | H. Yang | R. Aggarwal | U. Erdogan | M. Hanratty | S. Murtaza | R. Kraft | A.L.P. Rotondaro | J.C. Hu | M. Terry | W. Lee | C. Fernando | A. Konecni | G. Wells | D. Frystak | C. Bowen | I.-C. Chen
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