论文信息 - Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties - 字舞流文

Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties

D. Schmeißer | C. Das | K. Henkel | M. Tallarida | I. Kärkkänen | Jessica Schneidewind | B. Gruska | H. Gargouri | M. Arens