论文信息 - Continuous micro-optics fabrication using halftone masks and proximity printing

Continuous micro-optics fabrication using halftone masks and proximity printing

It is reported in this paper a method to fabricate three dimensional continuous micro-optical structures using half tone masks and proximity printing. The frequency modulation coded half tone masks are employed to obtain the predetermined exposure distribution. Several components like Cylinder microlens arrays, phase correctors are realized in photoresists.

Changtao Wang | Chunlei Du | Chuankai Qiu | Xiaochun Dong

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