Computational simulation for optimizing the thermal hyperfine patterning process and its experimental verification
暂无分享,去创建一个
Chung-Gil Kang | Yong-Phil Jeon | C. Kang | Hyunmin Oh | Hyun-June Oh | Gyu-Wan Hwang | Y. Jeon | Gyu-wan Hwang
[1] S. Youn,et al. A study of nanoscratch experiments of the silicon and borosilicate in air , 2004 .
[2] C. Kang,et al. Finite Element Analysis of Nano/Micro Pit Array Fabrication by Nanoindentation Process , 2004 .
[3] L. Jay Guo,et al. Recent progress in nanoimprint technology and its applications , 2004 .
[4] Chung-Gil Kang,et al. Maskless pattern fabrication on Pyrex 7740 glass surface by using nano-scratch with HF wet etching , 2005 .
[5] M. Gad-el-Hak. The MEMS Handbook , 2001 .
[6] W. Xiaodong,et al. Microfluidic chip made of COP (cyclo-olefin polymer) and comparion to PMMA (polymethylmethacrylate) microfluidic chip , 2008 .
[7] Chung-Gil Kang,et al. Effect of nanoscratch conditions on both deformation behavior and wet-etching characteristics of silicon (100) surface , 2006 .
[8] S. Youn,et al. FEA study on nanodeformation behaviors of amorphous silicon and borosilicate considering tip geometry for pit array fabrication , 2005 .
[9] Chung-Yen Chao,et al. Thermal-flow technique for reducing surface roughness and controlling gap size in polymer microring resonators , 2004 .
[10] Said Ahzi,et al. Modeling and validation of the large deformation inelastic response of amorphous polymers over a wide range of temperatures and strain rates , 2007 .